To provide a cleaning apparatus whose manufacturing cost is reduced and operability is enhanced by reducing the number of pipelines necessary to the cleaning apparatus and narrowing the area to be occupied by installation and to provide a cleaning method.
This cleaning apparatus 30 is constituted so that the inside of an airtight container 32 for housing a solvent is airtightly vided into a supply chamber 36 for housing the solvent to be used and a recovery chamber 38 for housing the used solvent by a partition wall 34 which is supported by a sliding/supporting part 42 so that the wall 34 can be slid so as to equalize the pressure inside the chamber 36 with that inside the chamber 38. The chambers 36 and 38 are connected to a manifold 12 by a supply pipe 44 and a recovery pipe 46 respectively. The pipe 44 is connected to a gas introducing pipe 52 for introducing a pressurized gas from a pressurized gas source 54. The pipe 46 is connected to an exhaust pipe 62 for evacuating gas from the cleaning apparatus by an evacuating source 64.
JEAN-MARC GILLARD
NASU AKINOBU
MINDY SHU
