Title:
CLEANING DEVICE
Document Type and Number:
Japanese Patent JP2008018329
Kind Code:
A
Abstract:
To provide a cleaning device by which a particle can be prevented from being re-stuck and which has a nozzle for sucking a liquid jetted from a cleaning tool and can be operated stably even when the flow rate of a cleaning liquid becomes higher.
The cleaning device is provided with: the cleaning tool 3 for removing the particle 5 on the surface of a glass substrate 2; a separation plate 6 for vertically separating the liquid 4 supplied from the cleaning tool 3; and a conveyer roller 2.
More Like This:
Inventors:
SUKAI JUNICHI
Application Number:
JP2006191809A
Publication Date:
January 31, 2008
Filing Date:
July 12, 2006
Export Citation:
Assignee:
SHARP KK
International Classes:
B08B3/12; B08B3/02; G02F1/13; G02F1/1333; H01L21/304
Attorney, Agent or Firm:
Noboru Ueno