Title:
CLEANING MECHANISM
Document Type and Number:
Japanese Patent JP2715896
Kind Code:
B2
Abstract:
PURPOSE: To clean the plane of a glass plate, for example, without requiring any manpower by pressing a holder, containing a film core applied with a wrapping film, against an objective plane (inspection stage) and then reciprocating the holder.
CONSTITUTION: A wrapping film to be wound around a film core 2, fixed to the forward end part of a cylinder 6 through a housing 4 and a holder 3, is lowered and pressed against an inspection stage 5. In order to press the wrapping film uniformly, the oscillating part is operated by a shaft 11 to copy the surface of the stage 5. The pressing force is regulated to a level appropriate for removing solder dust by means of a pneumatic pressure regulator 7 coupled with a cylinder 6. Solder dust is cleaned off the stage 5 by reciprocating the moving state. The wrapping film is formed into a loop by scattering fine particles of several μm on the outer peripheral surface of a resin film. The film core 2 is a rectangular prism made of an elastic material, e.g. silicone rubber.
Inventors:
Masato Ashida
Application Number:
JP2233394A
Publication Date:
February 18, 1998
Filing Date:
February 21, 1994
Export Citation:
Assignee:
NEC
International Classes:
G01B11/24; G01N21/88; G01N21/956; H01L21/66; H05K3/34; (IPC1-7): G01N21/88; G01B11/24; H01L21/66
Domestic Patent References:
| JP487785U | ||||
| JP354783U | ||||
| JP240486U | ||||
| JP481684U | ||||
| JP61174657U |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)
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