Title:
清浄作業台装置
Document Type and Number:
Japanese Patent JP4167850
Kind Code:
B2
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Inventors:
Keiichi Ono
Application Number:
JP2002127396A
Publication Date:
October 22, 2008
Filing Date:
April 26, 2002
Export Citation:
Assignee:
Hitachi Industrial Equipment Systems Co., Ltd.
International Classes:
B01L1/00; F24F9/00
Domestic Patent References:
| JP6233941A | ||||
| JP45021627B1 | ||||
| JP61067838U | ||||
| JP2053133U |
Attorney, Agent or Firm:
Polaire Patent Business Corporation
Katsuo Ogawa
Kyosuke Tanaka
Katsuo Ogawa
Kyosuke Tanaka