Title:
Clio pump
Document Type and Number:
Japanese Patent JP6031451
Kind Code:
B2
Inventors:
Sisoev Sergey
Bartlett Allen Jay
Caselo john jay
Wells Jeffrey A
Aircobbat Michael Jay
Bartlett Allen Jay
Caselo john jay
Wells Jeffrey A
Aircobbat Michael Jay
Application Number:
JP2013553508A
Publication Date:
November 24, 2016
Filing Date:
February 08, 2012
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP58124679U | ||||
| JP63112282U | ||||
| JP62051777A | ||||
| JP2010084702A | ||||
| JP2502034A | ||||
| JP63501585A |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko
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