PURPOSE: To prevent the re-adhesion of unnecessary resist bounding at the corners by forming an inner cup and a masking plate by means of bending face in a coating device comprising the inner cup, the masking plate, an outer cup and an exhaust system.

CONSTITUTION: In a coating device comprising a spinner head 1 on which a base S is placed, a rotating shaft 2 supporting the spinner head 1 rotatably from below, a motor 3 mounted on the lower end of the rotating shaft 2, an inner cup 4 protecting the spinner head 1 and the rotating shaft 2, a masking plate 6 provided outside the inner cup 4, an outer cup 5 provided outside the masking plate 6 and an air exhaust system, the inner cup 4 and the masking plate 6 are formed by the bending face. Thus the corners of the inner cup 4 and the masking plate 6 are eliminated and the bending faces are formed instead to control the splash of unnecessary resist, and air is exhausted smoothly as the corners are eliminated.