Title:
COATING METHOD AND COATING APPARATUS
Document Type and Number:
Japanese Patent JP2011011192
Kind Code:
A
Abstract:
To provide a coating method for reducing ununiformity of coating by separation of a coating liquid and defect by mixing of a foreign matter and forming a coating film of high quality on a substrate even with a simple constitution being excellent in practical use, and a coating apparatus.
By covering a liquid reservoir part 8 stored with a coating liquid 15, moisture absorption and volatilization of the coating liquid are suppressed and ununiformity of coating caused by these is sufficiently reduced. Further, by covering the liquid reservoir part, the foreign matter is prevented from being mixed into the coating liquid.
Inventors:
YAHARA MASAHIRO
Application Number:
JP2009159973A
Publication Date:
January 20, 2011
Filing Date:
July 06, 2009
Export Citation:
Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
B05D1/28; B05C5/02
Domestic Patent References:
JPH05329418A | 1993-12-14 | |||
JPH10328596A | 1998-12-15 | |||
JP2007296424A | 2007-11-15 | |||
JP2004073975A | 2004-03-11 | |||
JP2007105641A | 2007-04-26 | |||
JP2009291726A | 2009-12-17 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Yoshinori Shimizu
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