Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
COLOR FILTER INSPECTION METHOD AND SYSTEM
Document Type and Number:
Japanese Patent JP2008014728
Kind Code:
A
Abstract:

To provide a color filter inspection method for efficiently inspecting the irregularity of a color filter in a short time at a low cost by setting a non-cell region to an observation region of irregularity without being affected by a pixel or a moire, and a color filter inspection system.

In the color filter inspection method, the non-cell region 5 of the color filter is irradiated with light (S2) and transmitted and/or reflected light is imaged by the non-cell region 5 to form an inspection image (S3). Then, the density distribution of the inspection image is compared with that of a reference image obtained by preliminarily imaging a substrate having no irregularity to detect the irregularity 3 of the non-cell region 5 (S4).


Inventors:
FUKAZAWA YASUO
YAMADA EIJI
Application Number:
JP2006184885A
Publication Date:
January 24, 2008
Filing Date:
July 04, 2006
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHARP KK
International Classes:
G01N21/88; G01M11/00; G02B5/20; G02F1/1335
Attorney, Agent or Firm:
Kenzo Hara International Patent Office