To provide a combined sensor capable of reducing installation areas by combining an angular velocity sensor and an acceleration sensor to achieve a compact mounting substrate.
The combined sensor is provided with two drive arms 2 linked to a frame 12 and a flexure arm 4 linked between linking parts 16 of the frame 12 to which the frame 12 and the drive arms 2 are linked. The frame 12 has both an opposing part 18 opposed between the linking parts 16 and two connecting parts 22 connecting between the opposing part 18 and the linking parts 16. Angular velocities are computed by driving and oscillating the connecting parts 22 and drive arms 2 to each other and detecting bending vibrations of the flexure arm 4 which change due to the Coriolis force. Accelerations are computed by detecting drive vibrations of the connecting parts 22 which change due to stress applied to the connecting parts 22.
| JP3355998 | [Title of Invention] Vibrating gyro |
| JP4133670 | Angular velocity sensor |
| JP2000221040 | OSCILLATION GYRO |
AIZAWA HIROYUKI
Tomoyasu Sakaguchi
Hiroki Naito