To provide a combustible gas replacing nitrogen gas manufacturing device for allowing the use of low purity nitrogen gas produced in a deep separation method to replace combustible gas.
The combustible gas replacing nitrogen gas manufacturing device 1 comprises a fractionating column 10, a high purity nitrogen pipe 20 for carrying high purity nitrogen gas having high nitrogen purity from the fractionating column 10, a low purity nitrogen pipe 30 for carrying low purity nitrogen gas having lower nitrogen purity than the high purity nitrogen gas from the fractionating column 10, and a gas purity adjusting part 40 installed over between the high purity nitrogen pipe 20 and the low purity nitrogen pipe 30. The gas purity adjusting part 40 has a purity adjusting pipe 41, and a compressor 42 and a flow control valve 44 installed in the purity adjusting pipe 41. Thus, a proper amount of boosted high purity nitrogen gas is supplied to the low purity nitrogen gas to obtain combustible gas replacing nitrogen gas having proper purity.
COPYRIGHT: (C)2007,JPO&INPIT
KATO YUZO
SAKAMOTO NORIHIKO
| JPH07139874A | 1995-06-02 | |||
| JPH07139875A | 1995-06-02 |
Kiyoshi Yasushima
Souji Sasaki
Noboru Omura
Takanashi Norio
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