Title:
COMPLEX CHAMFERING APPARATUS OF CYLINDRICAL INGOT AND METHOD OF PERFORMING CYLINDRICAL GRINDING AND ORIENTATION FLAT GRINDING OF WORK BY USING THE SAME
Document Type and Number:
Japanese Patent JP2013038111
Kind Code:
A
Abstract:
To shorten the cylindrical grinding of the outer peripheral surface of a cylindrical ingot block, and to detect the crystal orientation of a workpiece with high accuracy.
In a complex chamfering apparatus 1 where same type n (n is an integer of 2-4) cylindrical grinders 500 are arranged across an XRD machine 600, wrinkles on the outer peripheral surface of a workpiece are removed by means of the cylindrical grinders 500, and then the crystal orientation of the workpiece thus ground is detected by means of the XRD machine 600 and marked. Thereafter, orientation flat grinding of the workpiece is performed using the cylindrical grinders 500.
Inventors:
MOCHIMARU YORIYUKI
KUBO TOMIO
IDE SATORU
KUBO TOMIO
IDE SATORU
Application Number:
JP2011170615A
Publication Date:
February 21, 2013
Filing Date:
August 04, 2011
Export Citation:
Assignee:
OKAMOTO MACHINE TOOL WORKS
International Classes:
H01L21/304; B24B5/01