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Title:
COMPOSITE CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP2014041734
Kind Code:
A
Abstract:

To provide a technique by which high resolution observation is made possible while keeping a sample in a cross-point position in a complex charged particle beam device equipped with a plurality of charged particle beam columns.

A sample 103 is placed at a cross-point 171 where an optical axis 101b of an ion beam column 101a and an optical axis 102b of an electron beam column 102b are intersected with each other, and a plurality of detachable components 108 constituting the tip of an objective lens are replaced, thereby changing the distance between the column tip and the sample 103 without changing a position of the cross-point 171.


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Inventors:
NOMAGUCHI HISANORI
AGEMURA TOSHIHIDE
Application Number:
JP2012182833A
Publication Date:
March 06, 2014
Filing Date:
August 22, 2012
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/28; H01J37/16; H01J37/24; H01J37/317
Domestic Patent References:
JP2012054169A2012-03-15
JPS57118356A1982-07-23
JPH0757677A1995-03-03
JPH05182625A1993-07-23
JP2006210254A2006-08-10
JP2010157370A2010-07-15
JP2006012583A2006-01-12
JP2006114225A2006-04-27
JPH09190790A1997-07-22
JPS61267246A1986-11-26
JPH11111211A1999-04-23
Foreign References:
US20110012018A12011-01-20
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki



 
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