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Title:
COMPOSITE MICROSCOPE SYSTEM
Document Type and Number:
Japanese Patent JP2000268763
Kind Code:
A
Abstract:

To provide the subject system with merits both of an electron microscope and an optical microscope by providing the system with a control personal computer, the electron and optical microscopes controlled by the personal computer, and a monitor displaying an observed magnified image in an changeover manner.

In an optical microscope 1 the magnification ratio is controlled by a control part 3 and the focus is controlled by a focus control part 4, while the position of a sample stage is controlled by a sample stage control part 4. In an electron microscope 6, the magnification ratio is controlled by a magnification control part 8 and the focus is controlled by a focus control part 9, while the position of a sample stage is controlled by a sample stage control part 10. An image changeover part 13 is controlled by a control operation personal computer 15. With such a construction, the cameral 11 and the microscopes 1, 6 are controlled by one control operation personal computer 15, and a required observation image is displayed on one monitor 14.


Inventors:
IKEDA KOSUKE
WATANABE MASAMITSU
Application Number:
JP7573599A
Publication Date:
September 29, 2000
Filing Date:
March 19, 1999
Export Citation:
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Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
H01J37/22; G01B9/04; G01B15/00; G01B15/08; G02B21/00; H01J37/24; (IPC1-7): H01J37/22; G01B9/04; G01B15/00; G02B21/00
Attorney, Agent or Firm:
Takehiko Suzue (2 outside)