To provide the subject system with merits both of an electron microscope and an optical microscope by providing the system with a control personal computer, the electron and optical microscopes controlled by the personal computer, and a monitor displaying an observed magnified image in an changeover manner.
In an optical microscope 1 the magnification ratio is controlled by a control part 3 and the focus is controlled by a focus control part 4, while the position of a sample stage is controlled by a sample stage control part 4. In an electron microscope 6, the magnification ratio is controlled by a magnification control part 8 and the focus is controlled by a focus control part 9, while the position of a sample stage is controlled by a sample stage control part 10. An image changeover part 13 is controlled by a control operation personal computer 15. With such a construction, the cameral 11 and the microscopes 1, 6 are controlled by one control operation personal computer 15, and a required observation image is displayed on one monitor 14.
WATANABE MASAMITSU
Next Patent: AUTOMATIC ELECTRON BEAM ANALYZER