化合物、樹脂、組成物及びパターン形成方法

Title:

化合物、樹脂、組成物及びパターン形成方法

Document Type and Number:

Japanese Patent JP7069530

Kind Code:

B2

Abstract:

Provided is a compound represented by formula (0).

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Inventors:

Masatoshi Echigo

Application Number:

JP2018528912A

Publication Date:

May 18, 2022

Filing Date:

July 21, 2017

Export Citation:

Assignee:

Mitsubishi Gas Chemical Co., Ltd.

International Classes:

C07C69/54; C07D311/78; C08F20/30; G03F7/11

Domestic Patent References:

Foreign References:

Attorney, Agent or Firm:

Yoshiyuki Inaba
Toshifumi Onuki
Kazuhiko Naito

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