To facilitate inspection work by adjusting a horizontal directional position of a conductive needle-like body, and to obtain an accurate inspection result by moving the conductive needle-like body in the vertical direction so as to properly obtain contact pressure between the conductive needle-like body and a measuring object.
This conductive contactor unit has a plurality of unit parts 4 for projecting the tip of the conductive needle-like body 16, and a body frame 19 for elastically repulsively contacting the tip of the conductive needle-like body 16 with the measuring object 2a by vertically moving by accompanying the plurality of these unit parts, and has a position adjusting mechanism 20 for adjusting the horizontal directional position of the unit parts 4 and the conductive needle-like body 16, and an auxiliary adjusting mechanism 21 for energizing the unit parts 4 in the downward direction via the position adjusting mechanism 20 between the unit parts 4 and the body frame 19.
ODAGIRI HITOSHI
NAKAGAWA HISAAKI
SOTOMA HIROYASU
Next Patent: PROBE GUARD