Title:
導電膜除去剤および導電膜除去方法
Document Type and Number:
Japanese Patent JP4998619
Kind Code:
B2
Abstract:
Disclosed is an agent for removing a conductive film, which contains: an acid having a boiling point of 80°C or higher, a base having a boiling point of 80°C or higher, or a compound which generates an acid or a base by external energy in combination with a solvent, a resin, and a leveling agent. Also disclosed is a method for removing a conducting film, which uses the agent for removing a conductive film. The agent for removing a conductive film and the method for removing a conductive film are capable of in-place uniformity removing a desired portion of a conductive film.
More Like This:
Inventors:
Hiroki Sekiguchi
Junji Sanata
Junji Sanata
Application Number:
JP2010512457A
Publication Date:
August 15, 2012
Filing Date:
March 25, 2010
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
International Classes:
C09K13/06; C09K13/02; H01B13/00; H01L21/306; H05K3/06
Domestic Patent References:
| JP2000309888A | 2000-11-07 | |||
| JP2004256901A | 2004-09-16 | |||
| JP2007115431A | 2007-05-10 | |||
| JP2004176115A | 2004-06-24 |