Title:
定温水供給装置
Document Type and Number:
Japanese Patent JP7427326
Kind Code:
B2
Abstract:
An objective of the present invention is to correct a setting temperature to reduce the temperature change of a processing unit and a workpiece to supply water to a processing apparatus. A constant temperature water supply apparatus is connected to the processing apparatus, has a temperature adjustment unit capable of adjusting the temperature of water to a setting temperature, and supplies the temperature-adjusted water to the processing apparatus. The constant temperature water supply apparatus comprises: an environment temperature measurement unit which measures the temperature of an environment; an after-use temperature measurement unit which measures the temperature of the water after the water is used by the processing apparatus as an after-use temperature; and a setting temperature instruction unit which issues an instruction for the setting temperature to the temperature adjustment unit. The setting temperature instruction unit has a setting temperature registration part which registers the setting temperature, and a setting temperature correction part which corrects the setting temperature registered in the setting temperature registration part. The setting temperature correction part corrects the setting temperature registered in the setting temperature registration part based on the after-use temperature of the water measured by the after-use temperature measurement unit and the temperature of the environment measured by the environment temperature measurement unit.
Inventors:
Miki Yoshida
Atsushi Saito
Atsushi Saito
Application Number:
JP2019153591A
Publication Date:
February 05, 2024
Filing Date:
August 26, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23Q11/14; B23Q11/10; B23Q11/12; B23Q17/00; B24B55/00; B24B55/02; B24B55/03; F24H15/212; H01L21/301
Domestic Patent References:
| JP55112748A | ||||
| JP2002039658A | ||||
| JP2001062670A | ||||
| JP2015020239A | ||||
| JP5169308A | ||||
| JP2004142020A | ||||
| JP2017156017A | ||||
| JP2017024108A | ||||
| JP2013193175A | ||||
| JP2019136846A |
Foreign References:
| US20050136821 | ||||
| US5197537 | ||||
| WO2019087882A1 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano