Title:
CONTACT PROBE AND ITS PRODUCTION METHOD, AND PROBE DEVICE PROVIDED WITH THE CONTACT PROBE
Document Type and Number:
Japanese Patent JPH10170549
Kind Code:
A
Abstract:
To make a contact prove possible to have a high hardness and superior in toughness, and to suppress peeling-off and bending of the contact probe.
In the contact probe having contact pins 3a, on which a plurality of pattern cables 3 are formed on a film 2 and each of tips of pattern wire are arranged to be projected from the film 2, at least the tip end is formed by nickel-manganese alloy and a high manganese alloy layer HM of which manganese concentration is set at 0.05wt.% or more and a low manganese alloy layer LM of which concentration is set at lower concentration than the high manganese alloy layer are provided.
More Like This:
| WO/2014/172282 | TESTING STACKED DEVICES |
| JP2585801 | [Title of Invention] Prove Card |
| JP2003215162 | PROBE CARD, AND SEMI-CONDUCTOR MEASURING INSTRUMENT PROVIDED WITH THE SAME |
Inventors:
KATO NAOKI
SASAKI ISATO
TAI AKIRA
MISHIMA TERUSHI
HIJI TOSHIHARU
MASUDA AKIHIRO
SASAKI ISATO
TAI AKIRA
MISHIMA TERUSHI
HIJI TOSHIHARU
MASUDA AKIHIRO
Application Number:
JP32572796A
Publication Date:
June 26, 1998
Filing Date:
December 05, 1996
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP
International Classes:
G01R1/073; H01L21/60; H01L21/66; (IPC1-7): G01R1/073; H01L21/60; H01L21/66
Attorney, Agent or Firm:
Masatake Shiga (2 outside)
Previous Patent: PROBE ADAPTOR
Next Patent: DIGITAL OSCILLOSCOPE, AND METHOD FOR EXPRESSING TIME-VARYING WAVEFORM BY OSCILLOGRAPH
Next Patent: DIGITAL OSCILLOSCOPE, AND METHOD FOR EXPRESSING TIME-VARYING WAVEFORM BY OSCILLOGRAPH