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Patent Searching and Data


Title:
CONTACTOR FOR PROBER
Document Type and Number:
Japanese Patent JPH06300783
Kind Code:
A
Abstract:

PURPOSE: To provide a probe contactor which achieves correct and stable measurements without being influenced by the noises in the surrounding circumstances if any when a probe is to be tested.

CONSTITUTION: A conductive film 30c is coated via a first insulating film 30b on the outer periphery of a wire 30a where a signal current runs, and moreover a second insulating film 30d is coated at the outer periphery of the conductive film 30c. The conductive film 30c is earthed. Therefore, since the wire 30a where a signal current runs is shielded by the conductive film 30c, influences by noises are eliminated and crosstalks between signal currents can be prevented. Moreover, since the second insulating film 30d eliminates influences resulting from the mutual contact with the other probe needle, correct and stable measurements are ensured.


Inventors:
MATSUDO MASAHIKO
Application Number:
JP11369093A
Publication Date:
October 28, 1994
Filing Date:
April 16, 1993
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
TEL YAMANISHI KK
International Classes:
G01R1/067; G01R1/073; H01L21/66; (IPC1-7): G01R1/073; G01R1/067; H01L21/66
Attorney, Agent or Firm:
Tetsuo Kanemoto (1 person outside)