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Patent Searching and Data


Title:
CONTINUOUS FORMATION OF THIN FILM
Document Type and Number:
Japanese Patent JPS62218553
Kind Code:
A
Abstract:

PURPOSE: To continuously form a thin film on a high-polymer film at a high yield without wrinkling the film by conveying the high-polymer film along the circumferential side face of a heated cylindrical can while impressing the periodically changing tension to the high-polymer film.

CONSTITUTION: The high-polymer film 1 is conveyed in tight contact with the circumferential side face of the heated cylindrical can 2 via various rolls 5, 6 from an un-winding roll 3 in a vacuum vessel 10 and after a metallic film or the like is formed thereon, the high-polymer film is taken up on a take up roll 4 again via various rollers 5, 6. The periodically oscillating tension is applied to the high-polymer film 1 by a method for applying the torque oscillation of the above-mentioned un-winding roll 3, the slight displacement of a free roller 5a, a slight quantity of rotating oscillation of an expander roller 6a, etc., on the side where the film 1 contacts the can 2 in the above-mentioned method for continuous formation of the thin film. The thin film is thus continuously formed on the high-polymer film 1 without wrinkling the film.


Inventors:
TAKAGI HIROTSUGU
KASANUKI YUJI
HASHIMOTO MORIMI
SUZUKI KENJI
Application Number:
JP5941886A
Publication Date:
September 25, 1987
Filing Date:
March 19, 1986
Export Citation:
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Assignee:
CANON KK
International Classes:
C23C14/20; C23C14/24; C23C14/56; (IPC1-7): C23C14/20; C23C14/24; C23C14/56
Attorney, Agent or Firm:
Yoshio Toyota