PURPOSE: To make continuous physical vapor deposition of a thin film on a high-polymer film without wrinkling the film by bringing the high-polymer film into contact with the outside peripheral face of a cylindrical can for heating and conveying the film while slightly oscillating the film.
CONSTITUTION: An evaporating material from a crucible 12 is deposited by evaporation on the high-polymer film 1 let off from an un-winding roll 3 in a vacuum vessel 10 provided with vacuum pumps 11a, 11b while the high- polymer film is conveyed along the outside peripheral face of the cylindrical can 2 for heating which is rotated by a free roller 5 and an expander roller 6. The film is then taken up on a take-up roll 4. Slight oscillations of about several Hz W several tens Hz are applied to the above-mentioned high-polymer film 1 by a method for bringing an oscillating 'Teflon(R)' 13 into contact therewith or the like. The high-polymer film 1 is thereby brought into tight contact with the outside periphery of the can 2 without wrinkling the film, by which the yield for forming the thin film is improved.
KASANUKI YUJI
HASHIMOTO MORIMI
SUZUKI KENJI
