Title:
搬送機構、及び、それを備えた真空処理装置
Document Type and Number:
Japanese Patent JP5530346
Kind Code:
B2
Inventors:
Ueno Hideki
Application Number:
JP2010282985A
Publication Date:
June 25, 2014
Filing Date:
December 20, 2010
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
B65G49/00; B65G25/04; B65G35/00; H01L21/677
Domestic Patent References:
| JP9291360A | ||||
| JP2006168957A |
Attorney, Agent or Firm:
Iwata Today sentence
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