To dispose an identification means and an obstacle detection means in a simple structure in view of a variety of restrictions, for a conveyance vehicle which conveys an object of conveyance, for example, such as a front opening unified pod (FOUP) for storing various substrates for manufacturing semiconductor devices.
The conveyance vehicle (20) to convey the object (10) of conveyance having an identification tag (12) on its side surface on the lower end side comprises: a body part (20a) opening both downward and on one side; a vertical moving means (21) capable of vertically moving the object of conveyance with its identification tag facing one side; a horizontal moving means (22) capable of horizontally moving the object of conveyance with its identification tag facing one side; the identification means (23) for reading the identification tag; an attachment means (24) for attaching the identification means to the lower end on one side of the body part; and the obstacle detection means (25) attached to the upper end of one side of the body part to detect an obstacle existing below through the sides of the identification means and attachment means.
JP2006298566A | 2006-11-02 |
Satoshi Nakamura