Title:
CONVEYING DEVICE FOR SEMICONDUCTOR ELEMENT
Document Type and Number:
Japanese Patent JPH01162346
Kind Code:
A
Abstract:
PURPOSE:To surely convey carriers by a method wherein the title device is constituted in such a structure that a plurality of the carriers are arranged in a guide of a square form and a plurality of these carriers are circulated and transferred along each side of the above guide of a square form. CONSTITUTION:A plurality of carriers 1 are arranged in a square along a guide 1 and spaces (m) and (n) are each provided along opposed guide pieces 11b and 11d. Two pieces of ICs are attracted from a tray 13 by a pickup tool and these are supplied to a carrier I' at an IC supply position H. Then, cylinders A, C, B and D are driven in order and with a series of the carriers 1 moved at one pitch in the directions shown by arrows (a) and (c), a new carrier is set at the position H. The carriers 1, on each of which two pieces of the ICs 2' are mounted, are moved in order with guides 11a, 11b and 11c in the above- mentioned order, are heated up by a heater 10 in the middle of the movement and reach an IC taking-out position K.
Inventors:
ICHIKAWA HIROSHI
Application Number:
JP32174887A
Publication Date:
June 26, 1989
Filing Date:
December 18, 1987
Export Citation:
Assignee:
TOSHIBA SEIKI KK
International Classes:
H01L21/677; B65G13/12; F15B9/03; H01L21/68; (IPC1-7): B65G13/12; F15B9/03; H01L21/68
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