Title:
CONVEYING SYSTEM IN CONTINUOUS PROCESSING STEP AND ITS CONTROL METHOD
Document Type and Number:
Japanese Patent JP3774836
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To eliminate a need of a lot retrieval in a stocker from a terminal and selection by an operator and contrive to enhance a scanning property, by a method wherein there is provided a transferring device for transferring lots relative to an automatic conveying vehicle in the vicinity of a detecting device so as to mount a plurality of lots simultaneously.
SOLUTION: There is provided a transferring device 20 for transferring lots relative to an automatic conveying vehicle in a step in the vicinity of a detecting device. A plurality of cassette receiving lots can be placed in the transferring device 20. For this reason, by operations of a slide table 23 provided with a vertical and lateral moving mechanism of buffers 22a to 22h of the transferring device 20 in the automatic conveying vehicle in the step, a cassette 19 is moved to an operator's side and lot information such as a lot ID, a step ID, operating priority and the like is displayed on a display unit 24 of the transferring device 20. Accordingly, it is not necessary for an operator to eliminate a need of a lot retrieval in a stocker from a terminal and selection for inspection operations and enhance operability.
Inventors:
Katsuhiro Inoue
Koji Sato
Koji Sato
Application Number:
JP27069297A
Publication Date:
May 17, 2006
Filing Date:
October 03, 1997
Export Citation:
Assignee:
Oki Electric Industry Co., Ltd.
International Classes:
B65G47/52; H01L21/677; B65G49/07; G05B19/418; H01L21/02; H01L21/68; (IPC1-7): H01L21/68; B65G47/52; H01L21/02
Domestic Patent References:
| JP3034441A | ||||
| JP5147723A | ||||
| JP2078243A | ||||
| JP7225255A |
Attorney, Agent or Firm:
Hisao Kobayashi
Souji Sasaki
Saburo Kimura
Noboru Omura
Souji Sasaki
Saburo Kimura
Noboru Omura