PURPOSE: To uniform the film thickness after drying of the liquid material applied to an article to be processed by providing an oven part, carrying belt, the stage to place the article to be processed, and rotation mechanism to a conveyor oven used to the manufacture of a liquid crystal display plate, etc.

CONSTITUTION: The substrate 7 to be processed to which a liquid material is applied is placed on a stage 3. And a carrying belt 2 is carried in a moving direction B with a belt drive mechanism 9. The stage 3 moves within an oven part 1 while rotating in a rotating direction C with rotation of the motor of a rotation mechanism. Consequently since the influence of the convection or air current within the part 1 to the liquid material on the substrate 7 can be dispersed, the film thickness generated after drying of the liquid material can be uniformed.