Title:
搬送システム
Document Type and Number:
Japanese Patent JP7184453
Kind Code:
B2
Abstract:
There is provided a conveyance system that conveys a workpiece to each of plural processing apparatuses. The conveyance system includes a conveyance passage, an automated workpiece conveying vehicle that travels on the conveyance passage, a stock unit, and a control unit. The conveyance passage is set in a space directly above the processing apparatus across the plural processing apparatuses. The stock unit includes a workpiece conveying part that conveys the workpiece between a workpiece stocker that houses the workpiece supplied to the processing apparatus and the automated workpiece conveying vehicle.
Inventors:
Kazuma Sekiya
Application Number:
JP2018095596A
Publication Date:
December 06, 2022
Filing Date:
May 17, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/677; H01L21/301
Domestic Patent References:
| JP2012253070A | ||||
| JP2011140366A | ||||
| JP10250836A | ||||
| JP2016125292A | ||||
| JP2002179205A | ||||
| JP8181184A | ||||
| JP2001315960A |
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Tomohiro Okamoto
Takahiro Kasahara