Title:
COOLING TYPE PHOTODETECTOR ELEMENT EVALUATION DEVICE
Document Type and Number:
Japanese Patent JPH05203486
Kind Code:
A
Abstract:
PURPOSE:To enable evalueting quantum efficiently at the light intensity of the background radiation level in a cooling type photodetector element. CONSTITUTION:A cooling type photodetector element 11 is placed in a space where the environment of the photodetector element is shielded from the exterior and is thermally contacted with a cooling tank 13 sealed with a coolant. On the other hand, a narrow band passage filter 5 and an ND filter 7 for attenuator thermally contacted with the cooling tank 13, are arranged on the light axis of the incident light coming the photodetector element 11, and the wave length of the radiation light coming from a black body is selected and reduced to the level of the background radiation to enable evaluating the quantum efficiency against the light intensity of the background radiation level.
Inventors:
KAWAHARA AKIHIRO
Application Number:
JP3848192A
Publication Date:
August 10, 1993
Filing Date:
January 29, 1992
Export Citation:
Assignee:
NEC CORP
International Classes:
G01J1/00; G01J1/02; H01L31/02; (IPC1-7): G01J1/00; G01J1/02; H01L31/02
Attorney, Agent or Firm:
Sugano Naka
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