Title:
INFRARED LIGHT DETECTOR ELEMENT
Document Type and Number:
Japanese Patent JPH05203487
Kind Code:
A
Abstract:
PURPOSE:To detect infrared light with high sensitivity by raising the adsorption rate of infrared light without causing any problem in strength of an infrared absorption film and producability, etc. CONSTITUTION:An infrared light detector element is constituted by providing a thin film resistor 2b in between a pair of upper and lower electrodes 2a, 2a' in an infrared light detector part provided on one surface of a base plate 1 and a preserver film 2c on the surface of the upstream electrode 2a. Both of the preserver film 2c and the thin film resistor 2b are so constituted to function as a low refractance infrared light absorber film and the upper electrode 2a located in between the preserver film 2c and the thin film resistor 2b functions as an infrared light absorber film with higher refractance than the preserver film 2c and the thin film resistor 2b.
Inventors:
HIMESAWA HIDEKAZU
IGARI MOTOO
KAMIYA FUMIHIRO
IGARI MOTOO
KAMIYA FUMIHIRO
Application Number:
JP1237492A
Publication Date:
August 10, 1993
Filing Date:
January 27, 1992
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01J1/02; G01J5/02; G01J5/20; (IPC1-7): G01J1/02; G01J5/02
Attorney, Agent or Firm:
Hiroyuki Nakai
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