Title:
COPYING DEVICE AND CONNECTING DEVICE USING THE SAME
Document Type and Number:
Japanese Patent JP3919684
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To perform carrying, setting and surface copying of a work under normal pressure, and perform carrying and surface copying of the work in an ultra-high vacuum with an automatic machine in flip-chip mounting, and to guarantee the parallelism suitable for the recognition by a camera of high magnifying power.
SOLUTION: This copying device is provided with a fixed stage 1 for holding a work A; an opposite stage 2 on which vacuum suction holes 6 are provided for holding a work B on the placing surface opposing the fixed stage 1; and a holder 3 which is brought into point-contact on the rear surface of the opposite stage 2 being contrary to the placing surface with a spherical surface portion 7, holds the opposite stage 2 via an O-ring 17 of an annular elastic body, and has a vacuum evacuation passage 8 opened to face the gap between the opposite stage 2 sealed with the O ring 17. The work B held on the opposite stage 2 is made to abut against the predetermined surface of the work A held on the fixed stage 1, and the abutting surface of the work B on the opposite stage 2 copies the work A so as to be parallel to the predetermined surface of the work A on the fixed stage 1, when the work B is pressed.
More Like This:
Inventors:
Horie Satoshi
Takahiro Yonezawa
Mikio Hasegawa
Kazushi Higashi
Tatsuo Sasaoka
Takahiro Yonezawa
Mikio Hasegawa
Kazushi Higashi
Tatsuo Sasaoka
Application Number:
JP2003067387A
Publication Date:
May 30, 2007
Filing Date:
March 13, 2003
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B25J15/06; H01L21/60; H05K13/04; (IPC1-7): H01L21/60; B25J15/06; H05K13/04
Domestic Patent References:
| JP6120465A | ||||
| JP2001135648A |
Attorney, Agent or Firm:
Takao Itagaki
Yoshihiro Morimoto
Yoshihiro Morimoto