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Title:
COUPLING APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2010219558
Kind Code:
A
Abstract:

To provide an apparatus that couples two objects so that the vibration of one object does not transmit to the other object.

An exposure apparatus exposes a substrate (P) by filling liquid (50) between a projection optical system (PL) and the substrate (P), and projecting a pattern image onto the substrate (P) via the projection optical system (PL) and the liquid (50). The projection optical system (PL) includes: a first group (60) including an optical member (60) that makes contact with the liquid (50); and a second group (MPL) that differs from the first group (60). The first group (60) is supported by a first support member; and the second group (MPL) is separated from the first group and is supported by a second support member that differs from the first support member.


Inventors:
ONO KAZUYA
SHIBAZAKI YUICHI
Application Number:
JP2010140590A
Publication Date:
September 30, 2010
Filing Date:
June 21, 2010
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B21/26; G03F7/20
Domestic Patent References:
JPH11288870A1999-10-19
JP2002170765A2002-06-14
JPH06168866A1994-06-14
JPH10303114A1998-11-13
JPH11288870A1999-10-19
JPH10340846A1998-12-22
JP2001343575A2001-12-14
JPS6232613A1987-02-12
JP2002170765A2002-06-14
Foreign References:
WO1999049504A11999-09-30
WO2001022480A12001-03-29
WO1999049504A11999-09-30
WO2001022480A12001-03-29
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi



 
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