Title:
極低温冷凍機、極低温冷凍機診断装置および極低温冷凍機診断方法
Document Type and Number:
Japanese Patent JP7233955
Kind Code:
B2
Abstract:
There is provided a cryocooler including a cryocooler cylinder, a pressure switching valve that generates a periodic pressure fluctuation inside the cryocooler cylinder, and a sensor that measures a periodic deformation of the cryocooler cylinder, which is caused by the periodic pressure fluctuation inside the cryocooler cylinder.
Inventors:
Yoji Mizuno
Kohei Shinohara
Kohei Shinohara
Application Number:
JP2019027744A
Publication Date:
March 07, 2023
Filing Date:
February 19, 2019
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F25B9/06; F25B9/14; G01M99/00
Domestic Patent References:
| JP2015178910A | ||||
| JP2003329325A | ||||
| JP2017040386A | ||||
| JP2013242112A | ||||
| JP6018110A | ||||
| JP2004340299A |
Foreign References:
| EP0720006A1 |
Attorney, Agent or Firm:
Morishita Kenki
Teruo Tomisho
Teruo Tomisho