Title:
CRYOGENIC COOLING DEVICE AND COOLING METHOD THEREON
Document Type and Number:
Japanese Patent JPH0626459
Kind Code:
A
Abstract:
PURPOSE: To reduce electric power necessary for cooling and improve the reliability of cooling system operation by cooling plural cryopumps installed at a neutral particle implanting device in a short time.
CONSTITUTION: The cryopanels 26, 28 of plural cryopumps installed in a neutral particle implanting device are cooled by a small-sized helium refrigerating machine 23. Various types of valves and the small-sized helium refrigerating machine 23 are arranged so that cooling of the cryopanels 26, 28 from room temperature may be carried out by cold cooling of liquid nitrogen used to cool a thermal shield plate 32, cold cooling of the small-sized helium refrigerating machine 23, and cold cooling of liquid helium itself.
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Inventors:
SAHO NORIHIDE
ISOKAMI HISASHI
YAMASHITA YASUO
KAWAKAMI HIROYUKI
KAMIIDE YASUO
ISOKAMI HISASHI
YAMASHITA YASUO
KAWAKAMI HIROYUKI
KAMIIDE YASUO
Application Number:
JP18211092A
Publication Date:
February 01, 1994
Filing Date:
July 09, 1992
Export Citation:
Assignee:
HITACHI LTD
International Classes:
F04B37/08; F25B9/00; F25B19/00; G21B1/17; (IPC1-7): F04B37/08
Attorney, Agent or Firm:
Yukihiko Takada
Next Patent: EXHAUST VACUUM PUMP FOR VACUUM MANUFACTURING DEVICE