Title:
CRYOPUMP
Document Type and Number:
Japanese Patent JP2016075218
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To restrain an increase of recovery time in a vacuum processing device and extend a regeneration interval of a cryopump.SOLUTION: A cryopump 10 comprises: a cryopump container 38 that defines a suction port 12; a refrigerator 16 that comprises a first stage 22 and a second stage 24 housed in the cryopump container 38 and in which the second stage 24 is cooled to a temperature lower than that of the first stage 22; a first cryopanel 18 thermally connected to the first stage 22 and surrounded by the cryopump container 38; and a second cryopanel 20 thermally connected to the second stage 24 and surrounded by the first cryopanel 18. The first cryopanel 18 comprises a plate member 32 including an inlet opening part in the suction port 12. The inlet opening part is formed in the plate member 32 so that the ratio of the conductance of the plate member 32 to the opening conductance of the suction port 12 is 6% or less.SELECTED DRAWING: Figure 1
Inventors:
OIKAWA TAKESHI
Application Number:
JP2014206158A
Publication Date:
May 12, 2016
Filing Date:
October 07, 2014
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP2014509365A | 2014-04-17 | |||
| JP2013160105A | 2013-08-19 | |||
| JPH05172054A | 1993-07-09 | |||
| JP2010084702A | 2010-04-15 |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
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