Title:
クライオポンプ
Document Type and Number:
Japanese Patent JP6806583
Kind Code:
B2
Abstract:
A cryopump includes a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage, a radiation shield which is thermally coupled to the high-temperature cooling stage and axially extends in a tubular shape from a cryopump intake port, a low-temperature cryopanel section which is thermally coupled to the low-temperature cooling stage, is surrounded by the radiation shield, and includes axially arranged cryopanels including a top cryopanel disposed closest to the cryopump intake port, and a top cryopanel accommodation cryopanel which is thermally coupled to the high-temperature cooling stage and is disposed in the cryopump intake port to form a top cryopanel accommodation compartment.
Inventors:
Takahashi Run
Application Number:
JP2017020092A
Publication Date:
January 06, 2021
Filing Date:
February 07, 2017
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/16; F04B37/08
Domestic Patent References:
| JP10213065A | ||||
| JP2014227989A | ||||
| JP6033874A | ||||
| JP2012180846A | ||||
| JP2012047120A | ||||
| JP2010025113A |
Attorney, Agent or Firm:
Sakaki Morishita
Tomisho Teruo
Tomisho Teruo