Title:
MOVPE成長における化合物半導体の結晶成長方法
Document Type and Number:
Japanese Patent JP3860122
Kind Code:
B2
Inventors:
Yoshiaki Nakano
Yukihiro Shimogaki
Takayuki Nakano
Fukushima Yasuyuki
Yukihiro Shimogaki
Takayuki Nakano
Fukushima Yasuyuki
Application Number:
JP2002576002A
Publication Date:
December 20, 2006
Filing Date:
March 25, 2002
Export Citation:
Assignee:
Japan Science and Technology Agency
International Classes:
H01L21/205; C30B25/02; C30B25/14; H01L21/20
Domestic Patent References:
| JP8017739A | ||||
| JP2000223498A |
Attorney, Agent or Firm:
Mamoru Shimizu