Title:
CRYSTAL PULLING UP DEVICE
Document Type and Number:
Japanese Patent JPS5692193
Kind Code:
A
Abstract:
PURPOSE:To obtain a desired single crystal having reliability by pulling up the crystal from melt while eliminating the matter suspending on the surface of the melt in a crucible by means of a removing means provided with an adjustable mechanism and heating part. CONSTITUTION:A predetermined material for growing is put into a crucible 13, and is heated 12, whereby it is changed to melt 17 for growing; at the same time, current is supplied to a heating heater 22 to maintain a removing device 21, a melt well 24 and a nozzle 23 at predetermined temperatures. Next, the suspended matter and micro-suspended lumps on the surface of the melt 17 are sucked away through the nozzle 23 by the operation of the removing device 21 and are contained into the well 24. Next, while the crucible 13 is being rotated together with a shaft 14, the melt 17 is kept at predetermined temp. and while a seed crystal 18 for growing is being rotated and contacted in this, a holding means 19 is pulled up while being rotated, whereby a desired single crystal is grown. Even if suspended matter and micro-suspended lumps are again produced during the crystal growing, it is possible to easily remove these by making the operation similar to the one mentioned above.
Inventors:
INOUE SHIYOUICHI
TERAJIMA KAZUTAKA
TERAJIMA KAZUTAKA
Application Number:
JP16921879A
Publication Date:
July 25, 1981
Filing Date:
December 27, 1979
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
C30B15/00; H01L21/02; H01L21/208; (IPC1-7): C30B15/00; H01L21/02
Previous Patent: コネクタ端子の製造方法およびコネクタ端子用材料の製造方法
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