Title:
CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2023133983
Kind Code:
A
Abstract:
To provide a cutting device which can continuously supply an assist liquid to a cut portion without using an expensive booster pump etc.SOLUTION: A cutting device 1 is formed including: a chuck table 8a which holds a workpiece; and cutting means 9 rotatably including a cutting blade 93 which cuts the workpiece held by the chuck table 8a. The cutting device 1 includes: cutting water injection nozzles 97a, 97b which are disposed at the cutting means 9 and inject cutting water L1 to the cutting blade 93 and the workpiece; and an assist liquid mixing nozzle 98 which is disposed adjacent to the cutting water injection nozzles 97a, 97b and mixes an assist liquid L2 with the cutting water L1 injected from the cutting water injection nozzles 97a, 97b.SELECTED DRAWING: Figure 2
Inventors:
TAKENOUCHI KENJI
Application Number:
JP2022039272A
Publication Date:
September 27, 2023
Filing Date:
March 14, 2022
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/02; B23Q11/00; B24B27/06; H01L21/301
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko