Title:
CYCLIC SILOXANE COMPOUND
Document Type and Number:
Japanese Patent JP2011006473
Kind Code:
A
Abstract:
To provide a new cyclic siloxane compound useful for an Si-containing film-forming material, especially for a material for a low dielectric constant insulating film suitable for a PECVD (plasma enhanced chemical vapor deposition) equipment.
The present invention provides a cyclic siloxane compound represented by general formula (20) where R18 represents a hydrocarbon group, R19 represents a hydrogen atom or a hydrocarbon group, g represents an integer of 2 to 10, and h represents an integer of 1 to 3. A specific example of the cyclic siloxane compound includes 2,4,6-tris(methoxymethyl)-2,4,6-trimethylcyclotrisiloxane.
Inventors:
HARA TAIJI
TAKAMORI MAYUMI
TAKAMORI MAYUMI
Application Number:
JP2010207028A
Publication Date:
January 13, 2011
Filing Date:
September 15, 2010
Export Citation:
Assignee:
TOSOH CORP
International Classes:
C07F7/21; H01L21/312; H01L21/316
Domestic Patent References:
JP2005023075A | 2005-01-27 | |||
JP2003040998A | 2003-02-13 | |||
JPH08505363A | 1996-06-11 | |||
JPH03167228A | 1991-07-19 | |||
JP2005023075A | 2005-01-27 | |||
JP2003040998A | 2003-02-13 | |||
JPH08505363A | 1996-06-11 | |||
JPH03167228A | 1991-07-19 |
Foreign References:
US3132117A | 1964-05-05 | |||
US3132117A | 1964-05-05 |