Title:
DECOMPOSING DEVICE FOR HALOGEN ORGANIC COMPOUND
Document Type and Number:
Japanese Patent JP3409905
Kind Code:
B2
Abstract:
PURPOSE: To reduce the size of a device by forming a hollow part by a UV transmittable inner peripheral wall in a reaction chamber, arranging a UV irradiation device into this hollow part, irradiating liquid with UV rays through the UV transmittable inner peripheral wall and adding an alkali to the liquid in the reaction chamber to prevent adhesion of deposits on the UV irradiation device.
CONSTITUTION: A prescribed amt. of an isopropanol (IPA) is supplied from a liquid tank 23 by a pump 29 into the reaction chamber 3. The irradiation with the UV rays by a UV lamp 5 is started and a prescribed amt. of a fluorocarbon is blown from a gas introducing pipe 11 into the IPA. A cock 13 is changed over to start hubbling. As a result, the fluorocarbon which is not completely dissolved is returned by a pump 19 during hubbling. The hubbling and the irradiation with the UV rays are stopped after lapse of the prescribed time and an alkali 35 is added from an alkali tank 33 to convert primarily decomposed matter R22 to secondarily decomposed matter and methane. An aq. Nail soln. of a washing water tank 41 is then supplied to execute washing.
Inventors:
Miho Suzuki
Masao Ikeda
Norio Takeyama
Terunobu Hayata
Masao Ikeda
Norio Takeyama
Terunobu Hayata
Application Number:
JP1022994A
Publication Date:
May 26, 2003
Filing Date:
February 01, 1994
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
A62D3/00; A62D3/176; A62D3/36; B01D53/32; B01D53/70; B01J19/12; C07B35/06; A62D101/04; A62D101/22; (IPC1-7): A62D3/00; B01J19/12; C07B35/06
Domestic Patent References:
| JP67474A | ||||
| JP6346178A | ||||
| JP49109351A | ||||
| JP5277205A | ||||
| JP4293517A |
Attorney, Agent or Firm:
Hidekazu Miyoshi (3 outside)