DEFECT INSPECTING METHOD AND ITS DEVICE - Toshiba IT Solutions Co., Ltd.

Title:

DEFECT INSPECTING METHOD AND ITS DEVICE

Document Type and Number:

Japanese Patent JP3412732

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To detect an defect in an object to be inspected in a short time.
SOLUTION: At the time of coming to the prescribed position of a line sensor camera 3, a sheet 6 is converted to picture data by a picture input part 22. When a filter part 23 filters this picture data to emphasize the defect, a defect data counting part 25 counts emphasized defect data positioned in a prescribed area set to be the inspecting window Wi of an inspecting area deciding processing part 27 when it is positioned. Then when each counted value is not less than a threshold value, a defect judging processing part 28 recognizes it as a defect to affect poststages and gives information on the defect with the name of an inspecting area to outside.

Inventors:

Noriyuki Arai
Norijun Sugiyama

Application Number:

JP16748696A

Publication Date:

June 03, 2003

Filing Date:

June 27, 1996

Export Citation:

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