Title:
DEPOSITION METHOD OF PHOTOCATALYST LAYER
Document Type and Number:
Japanese Patent JP3809347
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a photocatalyst layer having high photocatalytic performance.
SOLUTION: The photocatalyst layer 15 comprising anatase titanium oxide as a main component is obtained without heating a substrate 11, when sputtering is carried out by using a target comprising a metal titanium under the condition that a pressure under vacuum atmosphere is 1,064 mPa or more and 1,596 mPa or les and a pressure of oxygen gas is more than 45% and less than 65% of the vacuum atmosphere. Further, since a titanium oxide particle of the photocatalyst layer 15 has an elaborate and intricate shape, a specific surface area of the photocatalyst layer 15 is high. Accordingly, the photocatalyst layer 15 comprising anatase titanium oxide as a main component and having high photocatalytic performance is obtained.
Inventors:
Takahiro Takahiro
Nobutada Takahashi
Nobutada Takahashi
Application Number:
JP2001190730A
Publication Date:
August 16, 2006
Filing Date:
June 25, 2001
Export Citation:
Assignee:
Toyama Prefecture
Takagi Seiko Co., Ltd.
Takagi Seiko Co., Ltd.
International Classes:
B01J35/02; B01J21/06; C01G23/04; B01J37/02; C03C17/245; C23C14/34; (IPC1-7): B01J35/02; B01J21/06; B01J37/02; C01G23/04; C03C17/245; C23C14/34
Domestic Patent References:
| JP11047609A | ||||
| JP2000192226A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe
Previous Patent: SLUDGE COLLECTING APPARATUS
Next Patent: IMAGE PROCESSOR, PROCESSING METHOD, AND PROCESSING PROGRAM
Next Patent: IMAGE PROCESSOR, PROCESSING METHOD, AND PROCESSING PROGRAM