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Patent Searching and Data


Title:
SURFACE-ROUGHNESS MEASURING APPARATUS
Document Type and Number:
Japanese Patent JPH0642944
Kind Code:
A
Abstract:

PURPOSE: To obtain a surface-roughness measuring apparatus wherein the roughness of a surface and the displacement of the surface can be measured simultaneously by using one laser light source.

CONSTITUTION: A laser beam is generated by a semiconductor laser 1, the laser beam is condensed by a condensing lens 4 and projected perpendicularly onto the surface of an object 7 under test, reflected light 8 with reference to a projection from the condensing lens 4 is condensed by a condensing lens 10, and an image of the reflected light is formed on a position measuring element 12 for surface displacement detection. In addition, a positive reflection component from the surface of the object 7 under test is taken out by a mirror 3 which has been arranged and installed between the semiconductor laser 1 and the condensing lens 4, and the specular reflection component is photodetected by a phototransistor 14.


Inventors:
TAKAHASHI SATORU
Application Number:
JP5862192A
Publication Date:
February 18, 1994
Filing Date:
March 17, 1992
Export Citation:
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Assignee:
HITACHI LTD
AKITA DENSHI KK
International Classes:
G01B11/30; (IPC1-7): G01B11/30
Attorney, Agent or Firm:
Yamato Tsutsui