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Title:
DETECTING DEVICE FOR SURFACE POTENTIAL DISTRIBUTION
Document Type and Number:
Japanese Patent JPH01219570
Kind Code:
A
Abstract:

PURPOSE: To detect the surface potential distribution of a body to be detected by arranging a detection head nearby the body and making laser luminous flux incident.

CONSTITUTION: The laser luminous flux emitted by a laser light source 1 is transmitted through a lens 2, a polarizer 3, and a beam splitter 4 and enters the detection head RH. Here, the detection head RH is constituted by laminating a transparent electrode Et, an optical modulating material layer member PML, and a dielectric mirror DML and varying the thickness of the member PML. Then the member PML is applied with the electric field by the body O, so the laser luminous flux incident on the member PML changes in the states of ordinary light and extraordinary light according to the electric field and the light which is reflected by the mirror DML, passed through the member PML again, and emitted from the electrode Et varies correspondingly to the potential distribution of the charge image of the body O. Then, the emitted light enters an analyzer 6 through a beam splitter 4 and a wavelength plate 5 for light quantity adjustment and converted into an electric signal by a photoelectric converter 7.


Inventors:
TAKANASHI RYOYU
NAKAGAKI SHINTARO
SHINONAGA HIROHIKO
ASAKURA TSUTAE
FURUYA MASATO
Application Number:
JP4386988A
Publication Date:
September 01, 1989
Filing Date:
February 26, 1988
Export Citation:
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Assignee:
VICTOR COMPANY OF JAPAN
International Classes:
G01R15/24; G01R29/12; H01L21/66; H04N5/335; H04N5/369; (IPC1-7): G01R15/07; G01R29/12; H01L21/66; H04N5/335
Attorney, Agent or Firm:
Takama Imama