Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DETECTING METHOD FOR DEFECTIVE WIRE BONDING AND DEVICE USED FOR SAID METHOD
Document Type and Number:
Japanese Patent JPS6366945
Kind Code:
A
Abstract:

PURPOSE: To obtain a method, through which the substantial defectiveness of wire bonding is detected simply and positively, by upward erecting a defective bonding wire, exposed to an upward gas flow and detecting the erected defective bonding wire by a detecting means.

CONSTITUTION: Wires are bonded with pellets 2 bonded onto forward fed lead frames 1 in succession, the pellets 2 are exposed in an upward gas flow and a defective bonding wire 3 is erected upward, and such an erected defective bonding wire 3 is detected by a detecting means 13. An apparstus in which the terminals of two optical fibers of an optical fiber 14a, which is generally called a fiber sensor and a base end of which is connected to a light-emitting element, and an optical fiber 14b, a base end of which is connected to a photodetector, are directed and disposed in the detecting direction is used as said detecting means 13.


Inventors:
SHIBATA KOJI
Application Number:
JP21049086A
Publication Date:
March 25, 1988
Filing Date:
September 06, 1986
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ROHM CO LTD
International Classes:
H01L21/66; H01L21/60; (IPC1-7): H01L21/60; H01L21/66
Domestic Patent References:
JPS5772339A1982-05-06
JPS5863144A1983-04-14
Attorney, Agent or Firm:
Minoru Yoshida