Title:
DEVICE MANUFACTURING EQUIPMENT AND METHOD
Document Type and Number:
Japanese Patent JPH08167563
Kind Code:
A
Abstract:
PURPOSE: To indicate adequate edit parameters for processing contents on an editor for an operator of a device manufacturing equipment so as to enable him to edit parameters quickly.
CONSTITUTION: When control parameters for controlling a device manufacturing equipment in operation are set through a console 2, only the adequate control parameters out of all the control parameters of the device manufacturing equipment, are indicated, edited, and stored.
Inventors:
MOTOKI TOSHIHIKO
Application Number:
JP33095294A
Publication Date:
June 25, 1996
Filing Date:
December 09, 1994
Export Citation:
Assignee:
CANON KK
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)
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