Title:
DEVICE AND METHOD OF CONVEYING SHEET-SHAPED BASE BODY
Document Type and Number:
Japanese Patent JP3162144
Kind Code:
B2
Abstract:
PURPOSE: To prevent contamination during the conveyance of a sheet-shaped base body by holding it at a stationary state as the sheet-shaped base body is floated while the vibration amplitude of the sheet-shaped base body is controlled at high accuracy.
CONSTITUTION: A plurality of transfer units 1 with transfer space for rectilinearly advancing sheet-shaped base bodies and control units 2 with control space for controlling the movement of the sheet-shaped base bodies are combined. A plurality of nozzles for floating are formed undersides of the transfer space. Each of the nozzles for floating is connected to a gas supply system 8a. Suction holes 11 are formed at approximately the centers of the undersides of the control space of the control units 2. Grooves are made symmetrically centering around the suction holes 11. The grooves are closed within the peripheries for stopping and resting the sheet-shaped base bodies with high accuracy as ±0.2mm.
Inventors:
Masayuki Miyakoda
Ryo Onoda
Tadahiro Ohmi
Yu Umeda
Youichi Sugano
Ryo Onoda
Tadahiro Ohmi
Yu Umeda
Youichi Sugano
Application Number:
JP32805291A
Publication Date:
April 25, 2001
Filing Date:
November 16, 1991
Export Citation:
Assignee:
Watanabe Shoko Co., Ltd.
International Classes:
B23Q7/00; B65G43/10; B65G51/03; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B23Q7/00; B65G43/10; B65G51/03
Domestic Patent References:
| JP5244177A | ||||
| JP63225028A | ||||
| JP53107275A | ||||
| JP59215718A | ||||
| JP1173735A |
Other References:
第１４回超ＬＳＩウルトラクリーンテクノロジーシンポジウム（平成３年１０月２８−３０日）寄稿集２第２３−３５頁
Attorney, Agent or Firm:
Hisao Fukumori