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Patent Searching and Data


Title:
DEVICE AND METHOD FOR DRESSING POLISHING PAD
Document Type and Number:
Japanese Patent JP2004174658
Kind Code:
A
Abstract:

To provide a device for dressing a polishing pad which suppresses generation of scratches when polishing.

This device is pressed on the polishing pad 4 to dress the polishing pad 4, while rotating a diamond disc 7. The diamond disc 7 is manufactured by fixing many diamond particles 9 to the surface of a base metal 8. In a polygon obtained by performing two-dimension projection of each of the diamond particles 9, an average value of a diagonal line ratio defined as a value that the length of the longest diagonal line of a plurality of diagonal lines of the polygon of the same particle is divided by the length of the shortest diagonal line is within a range of 1.17 to 1.23.


Inventors:
ITANI NAOKI
Application Number:
JP2002343224A
Publication Date:
June 24, 2004
Filing Date:
November 27, 2002
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
B24B53/12; B24B53/017; B24B53/02; B24D7/00; H01L21/304; (IPC1-7): B24B53/12; B24B37/00; B24B53/02; B24D7/00; H01L21/304
Attorney, Agent or Firm:
Tadahiko Ito