Title:
DEVICE AND METHOD FOR MEASURING LIGHT INTENSITY
Document Type and Number:
Japanese Patent JP3830392
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a highly reliable and low-cost light intensity measuring device and a light intensity measuring method using the device for measuring a light of short wavelength such as ultraviolet using a wide band gap semiconductor such as a diamond membrane of polycrystalline semiconductor, capable of promptly and precisely carrying out a measurement.
SOLUTION: Ultraviolet 16 is made incident to a ultraviolet sensor 11 with a chopper 17 for ten seconds and afterwards the ultraviolet 16 is shut off for 10 seconds. Then, an output value of the ultraviolet sensor 11 is detected by a sensor amplifier 18 and the result is output to a digital multi-meter 19. A difference between the output value A, the value one second before the shutoff of the ultraviolet 16, and the output value B, the value one second after the shutoff, (A-B) is derived. The difference between the output values indicates the intensity of the ultraviolet 16.
Inventors:
Kazushi Hayashi
Yoshihiro Yokota
Takeshi Tachibana
Hiroyuki Takamatsu
Kenichi Inoue
Yoshihiro Yokota
Takeshi Tachibana
Hiroyuki Takamatsu
Kenichi Inoue
Application Number:
JP2002010738A
Publication Date:
October 04, 2006
Filing Date:
January 18, 2002
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
G01J1/02; G01J1/42; H01L31/0248; (IPC1-7): G01J1/02; G01J1/42; H01L31/0248
Domestic Patent References:
| JP4134290A | ||||
| JP53022487A | ||||
| JP3116780A | ||||
| JP11248531A | ||||
| JP7092023A |
Attorney, Agent or Firm:
Masanori Fujimaki