Title:
DEVICE AND METHOD FOR SIMULATION
Document Type and Number:
Japanese Patent JPH0962718
Kind Code:
A
Abstract:
To obtain a simulation result with high reliability in a short period of time.
Actual measurement data on an impurity concentration distribution and a simulation result are stored previously in a storage part as a data base 5; and then a calculation part 3 calculates an impurity concentration distribution on the basis of input data and a data processing part 4 performs a concentration converting process for the actual measurement data and simulation result stored in the data base 5 according to the instruction of input data A and then puts together and outputs the concentration distribution after the density conversion and the calculates impurity distribution.
Inventors:
TAKAHASHI SATOSHI
Application Number:
JP21434495A
Publication Date:
March 07, 1997
Filing Date:
August 23, 1995
Export Citation:
Assignee:
SONY CORP
International Classes:
H01L21/22; G06F17/50; G06F19/00; G06Q50/00; G06Q50/04; H01L21/00; H01L21/265; G06F17/00; (IPC1-7): G06F17/50; H01L21/22; H01L21/265
Attorney, Agent or Firm:
Kuninori Funabashi
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